Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12249115 | Large scale computational lithography using machine learning models | Dereje Shewaseged Woldeamanual, Jiuzhou Tang, Rainer Zimmermann, Robert M. Lugg, Hans-Jürgen Stock +1 more | 2025-03-11 |
| 7678408 | Method for compensating film height modulations in spin coating of a resist film layer | — | 2010-03-16 |
| 7270922 | Method for determining an edge profile of a volume of a photoresist after a development process | Alexander Philippou | 2007-09-18 |