Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7547646 | Trench capacitor structure and process for applying a covering layer and a mask for trench etching processes in semiconductor substrates | Henry Bernhardt, Michael Stadtmüller, Olaf Storbeck | 2009-06-16 |