Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7180283 | Wafer lifting device | Steffen Herberg, Falk Bednara | 2007-02-20 |
| 6804851 | Holder for semiconductor wafers in a brush-cleaning installation | Matthias Fehr, Thomas Mieth | 2004-10-19 |
| 6487744 | Device for cleaning a wafer of abrasive agent suspension remaining after polishing with brushes and DI water | — | 2002-12-03 |
| 6250141 | Scanning device | Stefan Geyer, Michael Horn | 2001-06-26 |