Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11309196 | Detection of adhesive residue on a wafer | Matthias Fehr, Walter Leitgeb | 2022-04-19 |
| 10782242 | Inspection method for semiconductor substrates using slope data and inspection apparatus | Nicolas Siedl | 2020-09-22 |