Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7084502 | Microelectromechanical device and method for producing it | Harald Bottner, Axel Schubert, Joachim Nurnus | 2006-08-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7084502 | Microelectromechanical device and method for producing it | Harald Bottner, Axel Schubert, Joachim Nurnus | 2006-08-01 |