Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10061874 | Method for monitoring a process and/or production plant | Michael Dallmann, Christiane Gast, Markus Remmel, Thomas Trenner | 2018-08-28 |
| 6887358 | Installation for processing wafers | — | 2005-05-03 |
| 6623231 | Plant for producing semiconductor products | — | 2003-09-23 |
| 6594546 | Plant for processing wafers | — | 2003-07-15 |