Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9165889 | Alignment mark definer | Joerg Ortner, Andreas Greiner | 2015-10-20 |
| 8947664 | Apparatus and method for aligning a wafer's backside to a wafer's frontside | Thomas Bitzer, Horst Kittner | 2015-02-03 |
| 7723710 | System and method including a prealigner | Robert Wistrela, Horst Kittner, John Cooper | 2010-05-25 |