Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6982495 | Mark configuration, wafer with at least one mark configuration, and a method of producing at least one mark configuration | Hans-Georg Fröhlich, Johannes Kowalewski, Udo Götschkes, Gerd Krause, Heike Langnickel +2 more | 2006-01-03 |