Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10199330 | Alignment mark arrangement, semiconductor workpiece, and method for aligning a wafer | Andreas Woerz | 2019-02-05 |
| 8674524 | Alignment marks and a semiconductor workpiece | Andreas Woerz | 2014-03-18 |
| 7820358 | Photo-resist material structure and method of producing the same | Andreas Woerz | 2010-10-26 |
| 7027943 | Method, device, computer-readable storage medium and computer program element for the computer-aided monitoring of a process parameter of a manufacturing process of a physical object | Jörn Maeritz | 2006-04-11 |
| 7016750 | Method, device, computer-readable storage medium and computer program element for monitoring of a manufacturing process | Jörn Maeritz | 2006-03-21 |