Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7636156 | Wafer inspection system and method | — | 2009-12-22 |
| 7342314 | Device having a useful structure and an auxiliary structure | Jens Bachmann, Klaus Goller, Reiner Schwab | 2008-03-11 |
| 5685999 | Compact laser machining head with integrated on-line path control for laser machining of material | Guenter Wiedemann, Lothar Morgenthal, Walter Schwabe, Klaus Barthel, Ruediger Arnold Gnann | 1997-11-11 |