Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7063921 | Photomask, in particular alternating phase shift mask, with compensation structure | Wolfgang Dettman, Josef Mathuni, Oliver Fagerer, Stephen Rahn | 2006-06-20 |
BS
Bettina Schiessl
Overall (All Time): #3,420,409 of 4,157,543Top 85%
1
Patents All Time