Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9653543 | Methods of fabricating isolation regions of semiconductor devices and structures thereof | Armin Tilke, Marcus Culmsee, Chris Stapelmann, Roland Hampp | 2017-05-16 |
| 8936995 | Methods of fabricating isolation regions of semiconductor devices and structures thereof | Armin Tilke, Marcus Culmsee, Chris Stapelmann, Roland Hampp | 2015-01-20 |
| 7452804 | Single damascene with disposable stencil and method therefore | Michael Beck, Armin Tilke, Hermann Wendt | 2008-11-18 |