Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12266552 | System and method for monitoring semiconductor processes | Matan Lapidot, Chunhua Song | 2025-04-01 |
| 12227846 | Monitoring thin film deposition | — | 2025-02-18 |
| 11929270 | Unconsumed precursor monitoring | Chunhua Song, Steve James Lakeman | 2024-03-12 |
| 11335575 | Unconsumed precursor monitoring | Chunhua Song, Steve James Lakeman | 2022-05-17 |
| 11175323 | Process monitoring using crystal with reactance sensor | — | 2021-11-16 |
| 10704150 | Monitoring thin film deposition | — | 2020-07-07 |