Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7538562 | High performance miniature RF sensor for use in microelectronics plasma processing tools | Craig Garvin, Michael Bonner | 2009-05-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7538562 | High performance miniature RF sensor for use in microelectronics plasma processing tools | Craig Garvin, Michael Bonner | 2009-05-26 |