Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9911615 | Apparatus and method for etching substrate, stamp for etching substrate and method for manufacturing the same | Jungwoo OH, Bugeun KI, Yunwon Song, Kyung Ho Kim | 2018-03-06 |
| 9437441 | Methods for etching substrate and semiconductor devices | Jungwoo OH, Yunwon Song, Bugeun KI | 2016-09-06 |