Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10408680 | Apparatus for optical emission spectroscopy | Sang Myung Lee | 2019-09-10 |
| 10107681 | Tube-type lens, optical emission spectroscopy (OES) apparatus including the tube-type lens, plasma monitoring system including the OES apparatus, and method of manufacturing semiconductor device by using the plasma monitoring system | In-Joong Kim | 2018-10-23 |
| 9721768 | Apparatus for optical emission spectroscopy and plasma treatment apparatus | In-Joong Kim | 2017-08-01 |