Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11862442 | Plasma process monitoring device and plasma processing apparatus including the same | — | 2024-01-02 |
| 10770273 | OES device, plasma processing apparatus including the same and method of fabricating semiconductor device | In-Joong Kim | 2020-09-08 |