Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8513141 | Defect etching of germanium | Laurent Souriau | 2013-08-20 |
| 8080505 | Slurry composition and method for chemical mechanical polishing of copper integrated with tungsten based barrier metals | Didem Ernur, Jörg Schuhmacher | 2011-12-20 |
| 7589052 | Slurry composition and method for chemical mechanical polishing of copper integrated with tungsten based barrier metals | Didem Ernur, Jörg Schuhmacher | 2009-09-15 |