Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9637379 | Method for producing a microelectromechanical transducer | Marcel Giesen, Thomas Metzger, Ansgar Schäufele | 2017-05-02 |
| 8003537 | Method for the production of planar structures | Xavier Rottenberg, Hendrikus Tilmans, Walter De Raedt | 2011-08-23 |