Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5292371 | Microwave plasma CVD apparatus comprising dual plungers for two-dimension plasma position adjustment | Munehiro Chosa | 1994-03-08 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5292371 | Microwave plasma CVD apparatus comprising dual plungers for two-dimension plasma position adjustment | Munehiro Chosa | 1994-03-08 |