Issued Patents All Time
Showing 26–40 of 40 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7445675 | Sensor for monitoring material deposition | — | 2008-11-04 |
| 7402849 | Parallel, individually addressable probes for nanolithography | Ming Zhang, David Bullen | 2008-07-22 |
| 7357035 | Sensor chip and apparatus for tactile and/or flow sensing | Jack Chen, Jonathan Engel | 2008-04-15 |
| 7351303 | Microfluidic systems and components | Kashan Ali Shaikh, Kee Suk Ryu, Edgar D. GOLUCH, Zhifang Fan, David Bullen | 2008-04-01 |
| 7343136 | Apparatus for detecting environmental conditions for a structure or article | Jonathan Engel | 2008-03-11 |
| 7281419 | Multifunctional probe array system | Xuefeng Wang | 2007-10-16 |
| 7247895 | Electrostatic nanolithography probe actuation device and method | David Bullen | 2007-07-24 |
| 7217396 | Microfabricated micro fluid channels | Kee Suk Ryu, David Bullen | 2007-05-15 |
| 7112918 | Microdischarge devices and arrays having tapered microcavities | J. Gary Eden, Sung-Jin Park, Jack Chen | 2006-09-26 |
| 7081624 | Scanning probe microscopy probes and methods | Jun Zou, Xuefeng Wang, David Bullen | 2006-07-25 |
| 6923054 | Microscale out-of-plane anemometer | Jack Chen | 2005-08-02 |
| 6867443 | Parallel, individually addressable probes for nanolithography | Ming Zhang, David Bullen | 2005-03-15 |
| 6642129 | Parallel, individually addressable probes for nanolithography | Ming Zhang, David Bullen | 2003-11-04 |
| 6418006 | Wide tuning range variable MEMs capacitor | Jun Zou | 2002-07-09 |
| 6166478 | Method for assembly of microelectromechanical systems using magnetic actuation | Yong Yi | 2000-12-26 |