Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4384938 | Reactive ion etching chamber | Brian H. Desilets, Thomas Günther | 1983-05-24 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4384938 | Reactive ion etching chamber | Brian H. Desilets, Thomas Günther | 1983-05-24 |