Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5643640 | Fluorine doped plasma enhanced phospho-silicate glass, and process | Ashima B. Chakravarti, Son Van Nguyen, Michael J. Shapiro | 1997-07-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5643640 | Fluorine doped plasma enhanced phospho-silicate glass, and process | Ashima B. Chakravarti, Son Van Nguyen, Michael J. Shapiro | 1997-07-01 |