Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6326794 | Method and apparatus for in-situ monitoring of ion energy distribution for endpoint detection via capacitance measurement | Paul M. Lundquist, Son V. Nguyen | 2001-12-04 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6326794 | Method and apparatus for in-situ monitoring of ion energy distribution for endpoint detection via capacitance measurement | Paul M. Lundquist, Son V. Nguyen | 2001-12-04 |