Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| T101302 | Selective reactive ion etching of polycrystalline silicon against monocrystalline silicon | Robert A. Gdula, Joseph C. Hollis | 1981-12-01 |
| 4264409 | Contamination-free selective reactive ion etching or polycrystalline silicon against silicon dioxide | Robert A. Gdula, Joseph C. Hollis | 1981-04-28 |
| 4214946 | Selective reactive ion etching of polysilicon against SiO.sub.2 utilizing SF.sub.6 -Cl.sub.2 -inert gas etchant | Robert A. Gdula, Joseph C. Hollis | 1980-07-29 |