Issued Patents All Time
Showing 51–55 of 55 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6089853 | Patterning device for patterning a substrate with patterning cavities fed by service cavities | Hans Biebuyck, Emmanuel Delamarche, Michel Bruno | 2000-07-18 |
| 5654548 | Source for intense coherent electron pulses | Hans-Werner Fink | 1997-08-05 |
| 5059804 | Delta-phi microlens for low-energy particle beams | Hans-Werner Fink, Bettina Stocker | 1991-10-22 |
| 4954711 | Low-voltage source for narrow electron/ion beams | Hans-Werner Fink, Roger Joseph Morin, Werner Stocker | 1990-09-04 |
| 4919780 | Method of making self-aligned apertures | Hans-Werner Fink, Roger Joseph Morin, Werner Stocker | 1990-04-24 |