Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5392116 | Interferometric phase measurement | — | 1995-02-21 |
| 4779001 | Interferometric mask-wafer alignment | — | 1988-10-18 |
| 4429992 | Method and device for testing optical imaging systems | Gerd Haeusler, Walter Jaerisch | 1984-02-07 |
| 4188124 | Interferometric measuring system | Walter Jaerisch | 1980-02-12 |