Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10894229 | Ozone abatement method for semiconductor manufacturing system | — | 2021-01-19 |
| 10434455 | Ozone abatement system for semiconductor manufacturing system | — | 2019-10-08 |
| 10369510 | Ozone abatement system for semiconductor manufacturing system | — | 2019-08-06 |
| 9452379 | Ozone abatement system for semiconductor manufacturing system | — | 2016-09-27 |
| 5279632 | Planar clean room ceiling structure | Donald W. Decker | 1994-01-18 |