Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4540251 | Thermo-mechanical overlay signature tuning for Perkin-Elmer mask aligner | Robert Adam Modavis | 1985-09-10 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4540251 | Thermo-mechanical overlay signature tuning for Perkin-Elmer mask aligner | Robert Adam Modavis | 1985-09-10 |