Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6132632 | Method and apparatus for achieving etch rate uniformity in a reactive ion etcher | Robert Huber, Cherngye Hwang, Diana Perez, John W. Williams | 2000-10-17 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6132632 | Method and apparatus for achieving etch rate uniformity in a reactive ion etcher | Robert Huber, Cherngye Hwang, Diana Perez, John W. Williams | 2000-10-17 |