Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5578161 | Method and apparatus for in-situ and on-line monitoring of trench formation process | — | 1996-11-26 |
| 5223914 | Follow-up system for etch process monitoring | Roland Chanclou | 1993-06-29 |
| 5139904 | Method of producing high resolution and reproducible patterns | Roland Chanclou | 1992-08-18 |
| 4814041 | Method of forming a via-hole having a desired slope in a photoresist masked composite insulating layer | — | 1989-03-21 |