Issued Patents All Time
Showing 51–75 of 75 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6884972 | Ceramic plate for a semiconductor producing/inspecting apparatus | Yasuji Hiramatsu | 2005-04-26 |
| 6878907 | Ceramic substrate and process for producing the same | Yasuji Hiramatsu | 2005-04-12 |
| 6878906 | Ceramic heater for semiconductor manufacturing and inspecting equipment | Atsushi Ito | 2005-04-12 |
| 6861620 | Ceramic heater | Yasuji Hiramatsu | 2005-03-01 |
| 6861165 | Aluminum nitride sintered compact, ceramic substrate, ceramic heater and electrostatic chuck | Yasuji Hiramatsu | 2005-03-01 |
| 6849938 | Ceramic substrate for semiconductor production and inspection | — | 2005-02-01 |
| 6835916 | Ceramic heater | Yasuji Hiramatsu | 2004-12-28 |
| 6825555 | Hot plate | Yasuji Hiramatsu | 2004-11-30 |
| 6815646 | Ceramic substrate for semiconductor manufacture/inspection apparatus, ceramic heater, electrostatic clampless holder, and substrate for wafer prober | Yasuji Hiramatsu | 2004-11-09 |
| 6809299 | Hot plate for semiconductor manufacture and testing | Yasuji Hiramatsu | 2004-10-26 |
| 6753601 | Ceramic substrate for semiconductor fabricating device | Yasuji Hiramatsu | 2004-06-22 |
| 6731496 | Electrostatic chuck | Yasuji Hiramatsu | 2004-05-04 |
| 6717116 | Semiconductor production device ceramic plate | Yasuji Hiramatsu | 2004-04-06 |
| 6710307 | Ceramic heater | Yasuji Hiramatsu | 2004-03-23 |
| 6686570 | Hot plate unit | Masakazu Furukawa, Jo SAITO | 2004-02-03 |
| 6677557 | Ceramic heater | Yasuji Hiramatsu | 2004-01-13 |
| 6646236 | Hot plate unit | Jo SAITO, Masakazu Furukawa | 2003-11-11 |
| 6639188 | Ceramic heater | — | 2003-10-28 |
| 6639191 | Hot plate unit | Jo SAITO, Masakazu Furukawa | 2003-10-28 |
| 6632512 | Ceramic substrate | — | 2003-10-14 |
| 6507006 | Ceramic substrate and process for producing the same | Yasuji Hiramatsu | 2003-01-14 |
| 6465763 | Ceramic heater | Yasuji Hiramatsu | 2002-10-15 |
| 5737018 | Exposure apparatus and method for vibration control system | Shuji Shimizu, Osamu Kuroda, Yoshikazu Takahashi | 1998-04-07 |
| 5559555 | Apparatus for performing exposure control pertaining to the luminance level of an object | Shuji Shimizu, Osamu Kuroda, Yoshikazu Takahashi | 1996-09-24 |
| 5473374 | Exposing apparatus for performing exposure control corresponding to the luminance level of an object | Shuji Shimizu, Osamu Kuroda, Yoshikazu Takahashi | 1995-12-05 |