Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6728588 | Apparatus and method for automatically controlling semiconductor manufacturing process in semiconductor factory automation system | Jin Jang, Byung-Woon Kim | 2004-04-27 |
| 6516238 | Semiconductor factory automation system and method for transporting semiconductor wafers | Jin Sun Kim, Moon Kim, Chang-Kee Hong, Tae Ho Lee, Yung-Hwan Chae +3 more | 2003-02-04 |