Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6429140 | Method of etching of photoresist layer | Jae-Hee Ha, Dong Hyen Yi | 2002-08-06 |
| 6080678 | Method for etching anti-reflective coating film | — | 2000-06-27 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6429140 | Method of etching of photoresist layer | Jae-Hee Ha, Dong Hyen Yi | 2002-08-06 |
| 6080678 | Method for etching anti-reflective coating film | — | 2000-06-27 |