Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6730528 | Mask set for measuring an overlapping error and method of measuring an overlapping error using the same | — | 2004-05-04 |
| 5928820 | Method for measuring pattern line width during manufacture of a semiconductor device | Cheol Kyu Bok | 1999-07-27 |
| 5891749 | Process for forming photoresist pattern in semiconductor device | — | 1999-04-06 |