Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6518134 | Method for fabricating a semiconductor device with an air tunnel formed in the lower part of a transistor channel | Kuk-Seung Yang | 2003-02-11 |
| 6348414 | Method for forming fine metal patterns by using damascene technique | Sung Keun Chang | 2002-02-19 |