Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5993595 | Ozone asher | Koon Ho Bae, Sang-Yun Lee, Hyung-Chang Kang, Roh Y. Sung, Sun-Dong Park +1 more | 1999-11-30 |
| 5558736 | Electron cyclotron resonance apparatus | Sang Yong Lee, Roh Y. Sung, Dae Hwan Kim | 1996-09-24 |
| 5354382 | Electron cyclotron resonance apparatus comprising wafer cooling pedestal | Roh Y. Sung, Chel Park, Sang Yong Lee, Dae Hwan Kim | 1994-10-11 |