Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6312518 | Apparatus for forming a photoresist film in a semiconductor device and method of forming a photoresist film using the same | — | 2001-11-06 |
| 6090521 | Apparatus for forming a photoresist film in a semiconductor device and method of forming a photoresist film using the same | — | 2000-07-18 |
| 5955857 | Wafer conveyor system | Ki-Ho Lee, Hae-San Ryoo, Yong Pyo Kim | 1999-09-21 |
| 5895551 | Plasma etching apparatus | — | 1999-04-20 |
| 5696382 | Ion-implanter having variable ion beam angle control | — | 1997-12-09 |