Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6757578 | Semiconductor factory automation system and method for processing lot of semiconductor wafers at full-automation mode or semi-automation mode | — | 2004-06-29 |
| 6438441 | Semiconductor factory automation system and method for resetting process recipe by employing trace file | Kil-Yong Noh, Hae-sung Kim, Woo Kyu Lee, Jong Mo AHN | 2002-08-20 |