Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7002675 | Method and apparatus for locating/sizing contaminants on a polished planar surface of a dielectric or semiconductor material | Donald F. Adamski, Todd Stevens | 2006-02-21 |
| 6192922 | Airflow control valve for a clean room | Mark C. Wolochuk, Lee I. Wolochuk, Christopher P. Sirovy, James F. LeBaron, Jeffrey W. Yarroll | 2001-02-27 |
| 5855823 | Steam humidifier | Christopher P. Sirovy, Mark C. Wolochuk, Travis J. Addington, Chuck K. McCabe, Greg A. Marvell | 1999-01-05 |