Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4981778 | Polysiloxane, resist for ion beam and electron beam lithography | — | 1991-01-01 |
| 4777119 | Method for developing poly(methacrylic anhydride) resists | Leroy J. Miller | 1988-10-11 |
| 4665009 | Method of developing radiation sensitive negative resists | — | 1987-05-12 |
| 4596761 | Graft polymerized SiO.sub.2 lithographic masks | — | 1986-06-24 |
| 4587203 | Wet process for developing styrene polymer resists for submicron lithography | Leroy J. Miller | 1986-05-06 |
| 4535054 | Wet process for developing styrene polymer resists for submicron lithography | Leroy J. Miller | 1985-08-13 |
| 4508812 | Method of applying poly(methacrylic anhydride resist to a semiconductor | — | 1985-04-02 |
| 4474869 | Polyvinylpyridine radiation resists | Leroy J. Miller | 1984-10-02 |