Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5331172 | Ionized metal cluster beam systems and methods | Nalin Kumar, Chenggang Xie, Rama R. Goruganthu | 1994-07-19 |
| 5290732 | Process for making semiconductor electrode bumps by metal cluster ion deposition and etching | Nalin Kumar, Chenggang Xie, Rama R. Goruganthu | 1994-03-01 |
| 5156997 | Method of making semiconductor bonding bumps using metal cluster ion deposition | Nalin Kumar, Rama R. Goruganthu | 1992-10-20 |