Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8653405 | Method for operating a vacuum plasma process system | Thomas Kirchmeier, Michael Glück, Christoph Hofstetter | 2014-02-18 |
| 8643279 | Determining high frequency operating parameters in a plasma system | Thomas Kirchmeier | 2014-02-04 |
| 8133347 | Vacuum plasma generator | Michael Glück, Christoph Hofstetter | 2012-03-13 |
| 8129653 | Plasma supply device | Thomas Kirchmeier, Hans-Juergen Windisch, Hanns-Joachim Knaus, Michael Glueck | 2012-03-06 |
| 7745955 | RF plasma supply device | Thomas Kirchmeier, Ekkehard Mann, Michael Glück, Christoph Hofstetter, Christoph Gerhardt | 2010-06-29 |
| 7705676 | Class D amplifier arrangement | Thomas Kirchmeier, Michael Glueck | 2010-04-27 |
| 7452443 | Vacuum plasma generator | Michael Glück, Christoph Hofstetter | 2008-11-18 |