Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7354860 | Manufacturing method of mask blank and manufacturing method of transfer mask | — | 2008-04-08 |
| 7226705 | Method of manufacturing a mask blank and a mask, the mask blank and the mask, and useless film removing method and apparatus | — | 2007-06-05 |
| 6733686 | Method and device for removing an unnecessary film | — | 2004-05-11 |