Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7732101 | Method of producing a glass substrate for a mask blank by polishing with an alkaline polishing liquid that contains colloidal silica abrasive grains | Junji Miyagaki | 2010-06-08 |
| 7691279 | Method of producing a glass substrate for a mask blank and method of producing a mask blank | — | 2010-04-06 |
| 7635544 | Transparent substrate for mask blank and mask blank | Osamu Suzuki, Akihiro Kawahara | 2009-12-22 |
| 7455785 | Method of determining a flatness of an electronic device substrate, method of producing the substrate, method of producing a mask blank, method of producing a transfer mask, polishing method, electronic device substrate, mask blank, transfer mask, and polishing apparatus | Masato Ohtsuka, Yasutaka Tochihara | 2008-11-25 |
| 7413832 | Method of producing a glass substrate for a mask blank, method of producing a mask blank, and method of producing a transfer mask | Junji Miyagaki | 2008-08-19 |
| 6951502 | METHOD OF DETERMINING A FLATNESS OF AN ELECTRONIC DEVICE SUBSTRATE, METHOD OF PRODUCING THE SUBSTRATE, METHOD OF PRODUCING A MASK BLANK, METHOD OF PRODUCING A TRANSFER MASK, POLISHING METHOD, ELECTRONIC DEVICE SUBSTRATE, MASK BLANK, TRANSFER MASK, AND POLISHING APPARATUS | Masato Ohtsuka, Yasutaka Tochihara | 2005-10-04 |
| 6127068 | X-ray membrane for x-ray mask, x-ray mask blank, x-ray mask, manufacturing method thereof and method of polishing silicon carbide film | Tsutomu Shoki | 2000-10-03 |