Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8535856 | Lithographic mask and manufacturing method thereof | Junji Mori | 2013-09-17 |
| 8263294 | Lithographic mask and manufacturing method thereof | Junji Mori | 2012-09-11 |
| 8067132 | Photomask and exposure method | Takashi Yasui | 2011-11-29 |
| 7585418 | Lithographic mask and manufacturing method thereof | Junji Mori | 2009-09-08 |
| 6800214 | Method for correcting characteristics of attenuated phase-shift mask | — | 2004-10-05 |
| 6508949 | Method for correcting characteristics of attenuated phase-shift mask | — | 2003-01-21 |