Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6688254 | Vapor deposition temperature control apparatus and method | Martin A. Callaway, Robert D. Adair, Kenneth S. Murphy | 2004-02-10 |
| 6319569 | Method of controlling vapor deposition substrate temperature | Martin A. Callaway, Robert D. Adair, Kenneth S. Murphy | 2001-11-20 |