Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6639289 | Dissolved wafer fabrication process and associated microelectromechanical device having a support substrate with spacing mesas | — | 2003-10-28 |
| 6143583 | Dissolved wafer fabrication process and associated microelectromechanical device having a support substrate with spacing mesas | — | 2000-11-07 |