Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7811938 | Method for forming gaps in micromechanical device and micromechanical device | Qun Li, Shou-Shan Fan | 2010-10-12 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7811938 | Method for forming gaps in micromechanical device and micromechanical device | Qun Li, Shou-Shan Fan | 2010-10-12 |