Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7522323 | Method and apparatus for printing a pattern with improved focus correction and higher throughput | — | 2009-04-21 |
| 7092134 | Method and apparatus for recording a hologram from a mask pattern by the use of total internal reflection holography and hologram manufactured by the method | Woo-Sung Han, Olivier H. Carnal | 2006-08-15 |
| 6657756 | Method and apparatus for increasing the effective efficiency of holograms | — | 2003-12-02 |
| 6329104 | Position alignment system for holographic lithography process | Basil Arthur Omar | 2001-12-11 |
| 5695894 | Method and apparatus for changing the scale of a pattern printed from a total internal reflection hologram | — | 1997-12-09 |
| 5640257 | Apparatus and method for the manufacture of high uniformity total internal reflection holograms | — | 1997-06-17 |
| 5187372 | Apparatus for and a method of transverse position measurement in proximity lithographic systems | — | 1993-02-16 |